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Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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DCH-Employees-701
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Tigre (talk | contribs)
DCH-Employees-701
2,257 edits
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Design position (material coordinates)      X,Y[um] = -35000.0000      0.0000
Design position (material coordinates)      X,Y[um] = -35000.0000      0.0000
Observation position (material coordinates) X,Y[um] = -34944.1516  -233.4722
Observation position (material coordinates) X,Y[um] = -34944.1516  -233.4722
<FONT COLOR="FFFFFF">Offset                                      X,Y[um] =    55.8484  -233.4722</FONT>
         Offset                                      X,Y[um] =    55.8484  -233.4722
         <span style="color:red">'''Offset                                      X,Y[um] =    55.8484  -233.4722'''</span>
Mark rotation angle(+clockwise)            [degree] = -3.119790e-01
Mark rotation angle(+clockwise)            [degree] = -3.119790e-01
Height measurement                                  = No height measurement
Height measurement                                  = No height measurement
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