Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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[[Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace| Boron Drive-in + Pre-dep (A1)]] | [[Specific_Process_Knowledge/Thermal_Process/A1_Bor_Drive-in_furnace|Boron Drive-in + Pre-dep furnace (A1)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/A2_Gate_Oxide_furnace| Gate Oxide (A2)]] | [[Specific_Process_Knowledge/Thermal_Process/A2_Gate_Oxide_furnace|Gate Oxide furnace (A2)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace| Phosphorous Drive-in (A3)]] | [[Specific_Process_Knowledge/Thermal_Process/A3_Phosphor_Drive-in_furnace|Phosphorous Drive-in furnace (A3)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide| Anneal Oxide (C1)]] | [[Specific_Process_Knowledge/Thermal_Process/C1_Furnace_Anneal-oxide|Anneal Oxide furnace (C1)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace| Anneal Bond (C3)]] | [[Specific_Process_Knowledge/Thermal_Process/C3_Anneal-bond_furnace|Anneal Bond furnace (C3)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/Furnace_APOX| APOX (D1)]] | [[Specific_Process_Knowledge/Thermal_Process/Furnace_APOX|APOX furnace (D1)]] | ||
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[[Specific_Process_Knowledge/Thermal_Process/Furnace_Noble| | [[Specific_Process_Knowledge/Thermal_Process/Furnace_Noble|Multipurpose Annealing furnace]] | ||
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