Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in 2014. | The Multipurpose annealing furnace it made by the company ATV Technologie, and it was installed in the cleanroom in 2014. | ||
The purpose of the ATV Furnace is annealing and oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | The purpose of the ATV Furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N<sub>2</sub>, H<sub>2</sub> or a mixture of the two gasses. | ||
Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). A the moment Danchip is has three different sets of quartz ware: | Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). A the moment Danchip is has three different sets of quartz ware: | ||