Specific Process Knowledge/Thermal Process/Furnace: Multipurpose annealing: Difference between revisions
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[[Image:ATV_ovn_boat.jpg|thumb|350x350px|Boat with wafer for the multipurpose annealing furnace.]] | [[Image:ATV_ovn_boat.jpg|thumb|350x350px|Boat with wafer for the multipurpose annealing furnace.]] | ||
The purpose of the ATV Furnace is | The purpose of the ATV Furnace is annealing and oxidation of different samples and resist pyrolysis. Annealling and resist pyrolysis can be done in vaccum or at atmospheric pressure, in a N</sub>2<sub> , H</sub>2<sub> or a mixture of the two gasses. | ||
Is is possible to change all quartz ware in the furnace (the furnace tube | Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). A the moment we have two different sets of quartz ware - One that is dedicated for resist pyrolysis, and one that is dedicated for annealing of oxidation of different sample, e.g. samples with metals. The quartz ware is normally changed once a week. | ||
The furnace is heated by use on 12 long heaters that are situated along the furnace tube and two flat heaters that are situated in the ends of the furnace tube. The that way the temperature will be very uniform everywhere in the furnace tube. For atmospheric pressure processes the maximum temperature is 1100 <sup>o</sup>C, and for vacuum processes the maximum temperature is 1050 <sup>o</sup>C. | The furnace tube is heated by use on 12 long heaters that are situated along the furnace tube and two flat heaters that are situated in the ends of the furnace tube. The that way the temperature will be very uniform everywhere in the furnace tube. For atmospheric pressure processes the maximum temperature is 1100 <sup>o</sup>C, and for vacuum processes the maximum temperature is 1050 <sup>o</sup>C. | ||
Very fast heating.. | Very fast heating.. | ||