Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions
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===TiO<sub>2</sub> results=== | ===TiO<sub>2</sub> results=== | ||
<gallery caption="Titanium dioxide thickness as function of number of cycles" widths="300px" heights="300px" perrow=" | <gallery caption="Titanium dioxide thickness as function of number of cycles" widths="300px" heights="300px" perrow="3"> | ||
image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C. | image:ALD_TiO2_grow_rate_150C.jpg| Temperature 150 <sup>o</sup>C. | ||
image:ALD_TiO2_grow_rate_250C.jpg| Temperature 250 <sup>o</sup>C. | image:ALD_TiO2_grow_rate_250C.jpg| Temperature 250 <sup>o</sup>C. | ||