Specific Process Knowledge/Thin Film deposition/ALD/TiO2 deposition using ALD: Difference between revisions
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<gallery caption="Titanium dioxide thickness as function of number of cycles" widths="200px" heights="200px" perrow="5"> | <gallery caption="Titanium dioxide thickness as function of number of cycles" widths="200px" heights="200px" perrow="5"> | ||
image:TiO2 150C 1200 cycles Si_HF_treated.jpg| Temperature 150 <sup>o</sup>C. | image:TiO2 150C 1200 cycles Si_HF_treated.jpg| Temperature 150 <sup>o</sup>C, 1200 cycles, HF treated. | ||
image:TiO2 150C 1200 cycles Si_untreated.jpg| Temperature | image:TiO2 150C 1200 cycles Si_untreated.jpg| Temperature 150 <sup>o</sup>C, 1200 cycles. | ||
image:TiO2 250C 750cycles_Si_untreated.jpg| Temperature | image:TiO2 250C 750cycles_Si_untreated.jpg| Temperature 250 <sup>o</sup>C, 750 cycles. | ||
image:TiO2 1000 cycles 300C Si_HF.jpg| Temperature | image:TiO2 1000 cycles 300C Si_HF.jpg| Temperature 300 <sup>o</sup>C, 1000 cycles, HF treated. | ||
image:TiO2 1000 cycles 300C Si_un.jpg| Temperature | image:TiO2 1000 cycles 300C Si_un.jpg| Temperature 300 <sup>o</sup>C, 1000 cycles. | ||
image:TiO2 350C 1250 cycles Si_HF_treated.jpg| Temperature 350 <sup>o</sup>C. | image:TiO2 350C 1250 cycles Si_HF_treated.jpg| Temperature 350 <sup>o</sup>C, 1250 cycles, HF treated. | ||
</gallery> | </gallery> | ||