Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
| Line 406: | Line 406: | ||
|- | |- | ||
| | | | ||
<pre> | |||
[Measurement information] | [Measurement information] | ||
Linear scaling value = 1.000000 | Linear scaling value = 1.000000 | ||
| Line 457: | Line 457: | ||
-326.7000 | -0.9 0.1 1.8 -0.9 -3.0 3.7 -3.6 | -326.7000 | -0.9 0.1 1.8 -0.9 -3.0 3.7 -3.6 | ||
-490.0000 | 2.6 2.4 1.5 -2.0 -5.2 1.9 1.2 | -490.0000 | 2.6 2.4 1.5 -2.0 -5.2 1.9 1.2 | ||
</pre> | |||
|- | |- | ||