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Specific Process Knowledge/Thin film deposition/Electroplating-Ni: Difference between revisions

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|style="background:WhiteSmoke; color:black"|<b>Value</b>
|style="background:WhiteSmoke; color:black"|<b>Value</b>
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Sample dimensions
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Sample dimensions
|style="background:LightGrey; color:black"|Diameter
|style="background:LightGrey; color:black"|Diameter
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100 or 150 mm 4" or 6")
50, 100 or 150 mm (2", 4" or 6")
 
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|style="background:LightGrey; color:black"|Allowed thickness
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1 mm
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameters
|style="background:LightGrey; color:black"|Temperature
|style="background:LightGrey; color:black"|Temperature
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30*C
52*C
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|style="background:LightGrey; color:black"|pH
|style="background:LightGrey; color:black"|pH
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acidic
3.5-3.8
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Sample requirements
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Sample requirements
|style="background:LightGrey; color:black"|Seed metal
|style="background:LightGrey; color:black"|Seed metal
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100 nm of either NiV, Ti/Au or Cr/Au recommended. Most commonly seed metals are sputtered using the [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-System(Lesker)]].
NiV.
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| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
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Ask Customer Support for details
Ask Danchip for details
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| style="background:LightGrey; color:black"|Forbidden materials
| style="background:LightGrey; color:black"|Forbidden materials
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Ask Customer Support for details
Ask Danchip for details|}
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