Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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|Using a BE mark, this subprogram corrects deflection gain and rotation of the main deflector | |Using a BE mark, this subprogram corrects deflection gain and rotation of the main deflector | ||
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!style="background:#4682B4; color:Black"|DISTMEM | |||
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== Load and restore a condition file == | === Load and restore a condition file === | ||
*Load and restore a condition file, click ‘Select condition file...’, choose the file from the list, e.g. ‘0.2nA_ap7’ and click OK. Restore the file by clicking ‘RESTOR/Edit Parameter...’. From the RESTOR window, click ‘Excecute’; the machine will now restore the conditions of the colum, this will take a few minutes. Exit the RESTOR window by clicking ‘Cancel’. | *Load and restore a condition file, click ‘Select condition file...’, choose the file from the list, e.g. ‘0.2nA_ap7’ and click OK. Restore the file by clicking ‘RESTOR/Edit Parameter...’. From the RESTOR window, click ‘Excecute’; the machine will now restore the conditions of the colum, this will take a few minutes. Exit the RESTOR window by clicking ‘Cancel’. | ||
== | === CURRNT, INITAE, and INITBE === | ||
*Execute ‘CURRNT’ click ‘CURRNT/Execute’. The program ends by stating the average value of five measurements of the e-beam current; write this average current in the logbook. | |||
*Execute INITAE; click 'INITAE/Execute'. | *Execute INITAE; click 'INITAE/Execute'. | ||
*Execute INITBE; click 'INITBE/Execute'. | |||
=== Execute 'daily' === | |||
== Execute 'daily' == | |||
*Execute the pre-defined set of sub-programs called ‘daily’: click 'Commands/Batch...'. Click ‘Condition file...’, choose ‘daily’, and click OK and execute. This set of programs takes around 8-10 minutes to run. | *Execute the pre-defined set of sub-programs called ‘daily’: click 'Commands/Batch...'. Click ‘Condition file...’, choose ‘daily’, and click OK and execute. This set of programs takes around 8-10 minutes to run. | ||