Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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== AGCRG == | == AGCRG == | ||
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|Open and edit AGCRG, in the program window *Enter the measured (from pre-aligner output) P mark position '''1''' Click 'RG mark detect condition: Setting' and adjust scan width and position. Use a large scan width (200-600 microns). In 'Scan type' choose 'fine scan', 'box scan' and choose the correct mark (cross or L-shaped). Start with an 'X only' scan. | |Open and edit AGCRG, in the program window *Enter the measured (from pre-aligner output) P mark position '''1''' Click 'RG mark detect condition: Setting' and adjust scan width and position. Use a large scan width (200-600 microns). In 'Scan type' choose 'fine scan', 'box scan' and choose the correct mark (cross or L-shaped). Start with an 'X only' scan. | ||
'''2''' Save and execute AGCRG | '''2''' Save and execute AGCRG ||If the program finds the mark, ask the program to transfer the gain settings to SETWFR P (both rough and fine) or SETWFR Q. Scan again with same settings but choose 'Y only' in the 'RG mark detect conditions'. | ||
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|If the program finds the mark, ask the program to transfer the gain settings to SETWFR P (both rough and fine) or SETWFR Q. Scan again with same settings but choose 'Y only' in the 'RG mark detect conditions'. | |||
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