Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions

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 |[[File:AGCRG2.png|400px]]
 |- align="center"
-| Open and edit AGCRG, in the program window *Enter the measured (from pre-aligner output) P mark position '''1''' Click 'RG mark detect condition: Setting' and adjust scan width and position. Use a large scan width (200-600 microns). In 'Scan type' choose 'fine scan', 'box scan' and choose the correct mark (cross or L-shaped). Start with an 'X only' scan.
+|Open and edit AGCRG, in the program window *Enter the measured (from pre-aligner output) P mark position '''1''' Click 'RG mark detect condition: Setting' and adjust scan width and position. Use a large scan width (200-600 microns). In 'Scan type' choose 'fine scan', 'box scan' and choose the correct mark (cross or L-shaped). Start with an 'X only' scan.
 '''2''' Save and execute AGCRG
 |
-| If the program finds the mark, ask the program to transfer the gain settings to SETWFR P (both rough and fine) or SETWFR Q. Scan again with same settings but choose 'Y only' in the 'RG mark detect conditions'.
+|If the program finds the mark, ask the program to transfer the gain settings to SETWFR P (both rough and fine) or SETWFR Q. Scan again with same settings but choose 'Y only' in the 'RG mark detect conditions'.
 |}