Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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= Calibration of condition file = | = Calibration of condition file = | ||
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*From the EBX menu on workspace 1, open the calibration window ‘Clb’. From this window, a previously used condition file (calibration file) dedicated to a certain aperture setting and current setting is loaded, re-calibrated, and saved again. | *From the EBX menu on workspace 1, open the calibration window ‘Clb’. From this window, a previously used condition file (calibration file) dedicated to a certain aperture setting and current setting is loaded, re-calibrated, and saved again. | ||