Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
| Line 199: | Line 199: | ||
If you by accident unload a cassette without evacuating the exchange-chamber, you must tick 'EXCH EVAC' and load your cassette onto stage and unload it to the autoloader again. | If you by accident unload a cassette without evacuating the exchange-chamber, you must tick 'EXCH EVAC' and load your cassette onto stage and unload it to the autoloader again. | ||
[[File:LoaderControl2.jpg| | [[File:LoaderControl2.jpg|500px]] | ||
= Calibration of condition file = | = Calibration of condition file = | ||