Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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If you by accident unload a cassette without evacuating the exchange-chamber, you must tick 'EXCH EVAC' and load your cassette onto stage and unload it to the autoloader again. | If you by accident unload a cassette without evacuating the exchange-chamber, you must tick 'EXCH EVAC' and load your cassette onto stage and unload it to the autoloader again. | ||
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= Calibration of condition file = | = Calibration of condition file = | ||