Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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= Load and unload of cassettes into/from autoloader = | = Load and unload of cassettes into/from autoloader = | ||
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For safety reasons, users are only authorized to unload cassettes from the autoloader and to load empty cassettes into the autoloader. | For safety reasons, users are only authorized to unload cassettes from the autoloader and to load empty cassettes into the autoloader. | ||
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#Close the door and click CLOSE | #Close the door and click CLOSE | ||
#Set the autoloader back in REMOTE | #Set the autoloader back in REMOTE | ||
= Transfer of cassettes between autoloader and e-beam writer = | = Transfer of cassettes between autoloader and e-beam writer = | ||