Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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Seen from the front-side of the cassette with the hook to the right, the workpiece windows (wafer positions) are named A, B, C etc in reading-direction from top left to bottom right. | Seen from the front-side of the cassette with the hook to the right, the workpiece windows (wafer positions) are named A, B, C etc in reading-direction from top left to bottom right. | ||
= Optical pre-alignment of wafers | = Optical pre-alignment of wafers = | ||
1. Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards the wall. | 1. Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards the wall. | ||
2. Open the Pre-Alignment Microscope System (PAMS) tool and Kappa Image Base from the Desktop. In Kappa Image Base, click ‘Open/Close Control Dialog’ in ‘Camera’. Click on the screen-icon to open camera view and the ‘>>’-icon to open the control dialog. If no contact can be reached to the camera via Kappa Image Base, restart the computer (login: cleanroom, password: Renrum12). | 2. Open the Pre-Alignment Microscope System (PAMS) tool and Kappa Image Base from the Desktop. In Kappa Image Base, click ‘Open/Close Control Dialog’ in ‘Camera’. Click on the screen-icon to open camera view and the ‘>>’-icon to open the control dialog. If no contact can be reached to the camera via Kappa Image Base, restart the computer (login: cleanroom, password: Renrum12). | ||
3. Turn on the yellow light. Align the stage to the zero-marker, and press x and y on the sensor controller. This zeros the position of the software according to zero of the stage. Always zero the stage at maximum magnification. | |||
4. In PAMS, choose JBX-9300FS and correct wafer size and position in the workpiece window. Enter the P and Q mark design positions (i.e. L-edit coordinates). | |||
5. Find the P mark at maximum magnification. Click ‘Get P’. Repeat the procedure with the Q mark. Calculate gain and rotation by clicking 'Calculate' and log the results in the Log-window by clicking 'Log result'. Switch off the yellow light after use. | |||
6. Save the alignment information (File/Save). The file should be saved under your name and date, eg ‘mettekjan312012.txt’, in the folder ‘C:\1 temp’. This file should be transferred to the e-beam computer 9500 by using FFFTP to the folder ‘\home\eb0\jeoleb\job\mark’. | |||
7. In the jdf-file, the theoretical (L-edit/CleWin) position of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S' (see section 7 in this manual and the separate sdf- and jdf-file preparation manual). | |||
Load and unload of cassettes into/from the e-beam writer | |||
= Load and unload of cassettes into/from autoloader = | |||
For safety reasons, users are only authorized to unload cassettes from the autoloader and to load empty cassettes into the autoloader. | |||
Load and unload of cassettes into the autoloader can only be done via the touch-screen on the autoloader itself. | |||
To load a cassette: | |||
#Set the interface in LOCAL, by clicking REMOTE (clicking this button toggles between REMOTE and LOCAL) | |||
#Click OPEN and open the door | |||
#Carefully put the cassette onto the platform with the hook away from yourself | |||
#Close the door and click CLOSE | |||
#Click the large green button (with number) until you reach the slot number you wish to load your cassette to | |||
#Click arrow right. Confirm the transfer by clicking START (or click CANCEL if you regret). Do not change the comment. | |||
#After transfer, set the autoloader back in REMOTE | |||
To unload a cassette: | |||
#Set the interface in LOCAL, by clicking REMOTE (clicking this button toggles between REMOTE and LOCAL) | |||
#Click the large green button (with number) until you reach the slot number you wish to unload your cassette from | |||
#Click arrow left. Confirm the transfer by clicking START (or click CANCEL if you regret). | |||
#Click OPEN and open the door | |||
#Carefully take the cassette from the platform and put it on the lint-free tissues on the table | |||
#Close the door and click CLOSE | |||
#Set the autoloader back in REMOTE | |||