Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
No edit summary |
|||
| Line 14: | Line 14: | ||
<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 E-beam writer in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 E-beam writer in LabManager] | ||
''' Supplementary manuals for sdf- and jdf-files and BEAMER can be found here: ''' | |||
# [[Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER|BEAMER Manual on LabAdviser]] | |||
# [[Specific_Process_Knowledge/Lithography/EBeamLithography/FilePreparation|Sdf- and jdf file preparation manual on LabAdviser]] | |||