Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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== Dose variation defined by datatype or layertype == | == Dose variation defined by datatype or layertype == | ||
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When designing your pattern, you can define a dose variation either by defining different areas in different GDS datatype or in different layertype. | When designing your pattern, you can define a dose variation either by defining different areas in different GDS datatype or in different layertype. | ||
In both cases you import the GDS-file as usual into BEAMER, importing all layers. The layers should be visible when you view the GDSfile: | In both cases you import the GDS-file as usual into BEAMER, importing all layers. The layers should be visible when you view the GDSfile: | ||
If you defined different doses by different GDS layers, you should tick 'Datatype to Class' under 'Advanced' when you convert to v30. | If you defined different doses by different GDS layers, you should tick 'Datatype to Class' under 'Advanced' when you convert to v30. | ||
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</pre> | </pre> | ||
== Dose variation defined by an array in jdf file == | == Dose variation defined by an array in jdf file == | ||