Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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[[File:beamer7.jpg|400px|right]] | |||
If you defined different doses by different GDS layers, you should tick 'Datatype to Class' under 'Advanced' when you convert to v30. | If you defined different doses by different GDS layers, you should tick 'Datatype to Class' under 'Advanced' when you convert to v30. | ||
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</pre> | </pre> | ||
== Proximity Error Correction (PEC) == | == Proximity Error Correction (PEC) == | ||