Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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'''If your pattern is larger than one field size''', it will be stitched by several fields. In the tab 'Multipass', you can choose to smooth the stitching errors by overlapping the fields to be stitched or by multipass | '''If your pattern is larger than one field size''', it will be stitched by several fields. In the tab 'Multipass', you can choose to smooth the stitching errors by overlapping the fields to be stitched or by multipass method. | ||
There are 3 types of overlap methods | There are 3 types of overlap methods; for all 3 methods you define an overlap width: | ||
standard: the overlap will be exposed with half dose both of field 1 and field2; | standard: the overlap will be exposed with half dose both of field 1 and field2; | ||