Specific Process Knowledge/Lithography/EBeamLithography/BEAMER: Difference between revisions
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! width="400" | | ! width="400" | | ||
! width="400" | | ! width="400" | | ||
|- border="0" | |||
|[[File:beamer1.jpg|400px|left]] | |[[File:beamer1.jpg|400px|left]] | ||
|[[File:beamer2.jpg|400px|center]] | |[[File:beamer2.jpg|400px|center]] | ||
|[[File:beamer3.jpg|400px|right]] | |[[File:beamer3.jpg|400px|right]] | ||
|- align="center" | |- align="center" | ||
| | | Import a file || Export a file || Choose right parameters | ||
|} | |} | ||
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'''If your pattern is larger than one field size'', it will be stitched by several fields. In the tab 'Multipass', you can choose to smooth the stitching errors by overlapping the fields to be stitched or by multipass | '''If your pattern is larger than one field size''', it will be stitched by several fields. In the tab 'Multipass', you can choose to smooth the stitching errors by overlapping the fields to be stitched or by multipass | ||
There are 3 types of overlap methods, in all 3 methods you define an overlap width; | There are 3 types of overlap methods, in all 3 methods you define an overlap width; | ||