Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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= | = Cassettes = | ||
Authorized users are allowed to unload a cassette from the robot loader (autoloader) and mount their substrate but '''not''' allowed to load the cassette into the loader after mount. | Authorized users are allowed to unload a cassette from the robot loader (autoloader) and mount their substrate but '''not''' allowed to load the cassette into the loader after mount. | ||