Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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= Mount = | = Mount = | ||
Authorized users are allowed to unload a cassette from the robot loader (autoloader) and mount their substrate but '''not''' allowed to load the cassette into the loader after mount. | |||
We have one chip cassette, 2 2" cassettes, 2 4" cassettes, many 6" cassettes and 1 8" cassette. Some cassettes are made of Aluminum, others of Titanium. The thermal expansion coefficient of Ti is much lower than of Al; bear this in mind if you have crucial patterns to expose. | |||
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|- border="0" | |- border="0" | ||
| [[File:IMG_6440.jpg|150px]] [[File:IMG_6441.jpg|150px]] | | [[File:IMG_6440.jpg|150px]] [[File:IMG_6441.jpg|150px]] | ||
| [[File: | | [[File:2inchAl.JPG|150px]] [[File:IMG_6434.jpg|150px]] | ||
| [[File: | | [[File:4inchTi.JPG|150px]] [[File:IMG_6437.jpg|150px]] | ||
| [[File: | | [[File:4inchAl.JPG|150px]] [[File:IMG_6439.jpg|150px]] | ||
|- align="center" | |- align="center" | ||
| 2" Ti cassette; | | 2" Ti cassette; wafer orientation is flat-down || 2" Al cassette; wafer orientation is flat-up || 4" Ti cassette; wafer orientation is flat-down || 4" Al cassette; wafer orientation is flat-down | ||
|} | |} | ||