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|Thermal SiO2 | |Thermal SiO2 | ||
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|rowspan=" | |rowspan="8" valign="top"|[[Specific Process Knowledge/Thin film deposition| Thin film deposition]] | ||
|Sputter deposition | |Sputter deposition | ||
|Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br> | |Metals: Al, Ti, Cr, Co, Ni, Cu, Mo, Pd, Ag, Sn, Ta, W, Pt, Au, Fe, Mg, Nb, Ru <br> | ||