Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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# Create sdf and jdf-files: | # Create sdf and jdf-files: | ||
#*download [http://download.cnet.com/SuperEdi/3000-2352_4-10291091.html SuperEdi], | #*download [http://download.cnet.com/SuperEdi/3000-2352_4-10291091.html SuperEdi], | ||
#*read the sdf and jdf-file manual found [[Specific_Process_Knowledge/Lithography/EBeamLithography/ | #*read the sdf and jdf-file manual found [[Specific_Process_Knowledge/Lithography/EBeamLithography/FilePreparation|here]], | ||
#*find templates of sdf and jdf files on the cleanroom drive in the folder E-beam sdf and jdf templates. | #*find templates of sdf and jdf files on the cleanroom drive in the folder E-beam sdf and jdf templates. | ||
# Assist a fully trained colleague of yours when she or he e-beam writes, gather as much knowledge about your e-beam run, i.e. which e-beam current, aperture and dose to use, which shot pitch (e.g. SHOT A,10). | # Assist a fully trained colleague of yours when she or he e-beam writes, gather as much knowledge about your e-beam run, i.e. which e-beam current, aperture and dose to use, which shot pitch (e.g. SHOT A,10). | ||