Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | ||
== Arrays of arrays == | |||
If you need to pattern a structure that consists of repetitions of a single pattern, you can easily design the pattern using arrays of arrays in the jdf-file. | |||
This pattern has two arrays; array no. 1 consists of a column of 3 different chips, array no. 2 consists of 6 rows, each row containing array no. 1, thus endning up with 18 chips in a matrix of 6 x 3 chips. A shot modulation of -30% is applied to the first column of the matrix, a shot modulation of -20% is applied to column 2-6. | |||
The upper left chip of the matrix is positioned in (X,Y) = (-7000,7000) micrometer. | |||
<pre> | |||
JOB/W 'TEST',4 | |||
PATH DRF5M | |||
ARRAY (-7000,1,0)/(7000,1,0) | |||
ASSIGN A(2) ->(*,*) | |||
AEND | |||
2: ARRAY (0,6,1000)/(0,1,0) | |||
ASSIGN A(1) -> ((1,1),SHOT1) | |||
ASSIGN A(1) -> ((2-6,1),SHOT2) | |||
AEND | |||
1: ARRAY (0,1,0)/(0,3,1000) | |||
ASSIGN P(1) -> (1,1) | |||
ASSIGN P(2) -> (1,2) | |||
ASSIGN P(3) -> (1,3) | |||
AEND | |||
P(1) 'resolution1.v30' | |||
P(2) 'resolution2.v30' | |||
P(3) 'resolution3.v30' | |||
STDCUR 2 | |||
SPPRM 4.0,,,,1.0,1 | |||
SHOT1: MODULAT ((0,-30)) | |||
SHOT2: MODULAT ((0,-20)) | |||
END | |||
</pre> | |||
== Compiling to mgn == | == Compiling to mgn == | ||