Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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CALPRM '10na_ap6' | CALPRM '10na_ap6' | ||
DEFMODE 2 | DEFMODE 2 | ||
RESTOR 1 | RESTOR 1 Coloumn is restored to 10na_ap6 and lenses are demagnetized | ||
RESIST 240 | RESIST 240 | ||
SHOT A,18 | SHOT A,18 | ||
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</pre> | </pre> | ||
Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | |||