Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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 In the jdf-file, you assign different layers of the pattern to different dose modulations, m.
- If you define the dose variations by different datatype or layertype as described in section 3.2 of the BEAMER manual, you should define the dose for each layer number. You can check the layer numbers in BEAMER when you view the pattern, as seen in section 3.1 and 3.2 in the BEAMER manual.
+If you define the dose variations by different datatype or layertype as described in section 3.2 of the BEAMER manual, you should define the dose for each layer number. You can check the layer numbers in BEAMER when you view the pattern, as seen in section 3.1 and 3.2 in the BEAMER manual.
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