Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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note 1: Width, length, type and orientation of global marks (GLMP) or chipmarks (CHMARK); the settings of the parameters t (type) and f (orientation) are listed in the two tables below: | note 1: Width, length, type and orientation of global marks (GLMP) or chipmarks (CHMARK); the settings of the parameters t (type) and f (orientation) are listed in the two tables below: | ||
[[File:marktype.jpg| | [[File:marktype.jpg|200px]] | ||
[[File:markorientation.jpg| | [[File:markorientation.jpg|200px]] | ||