Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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The parameters in the GLMDET-command can be as follows: | The parameters in the GLMDET-command can be as follows: | ||
[[File:GLMDET.jpg|400px]] | [[File:GLMDET.jpg|400px]] | ||
And the parameters in the CHIPAL-command can be as follows: | And the parameters in the CHIPAL-command can be as follows: | ||
[[File:CHIPAL.jpg|400px]] | [[File:CHIPAL.jpg|400px]] | ||