Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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==Cleaning of wafers or masks== | ==Cleaning of wafers or masks== | ||
[[Image:7-up_RR3.jpg|300x300px|right|thumb|7-up 4": positioned in cleanroom 3<br\> -Up to 19 wafers of 4" at a time.<br\> -Materials allowed: Silicon, Silicon oxide, Silicon nitride, PolySi]] | |||
Cleaning of wafers or masks with sulphuric acid can be done either in a dedicated tank "7-up" or in the fumehood in a beaker "Piranha" | Cleaning of wafers or masks with sulphuric acid can be done either in a dedicated tank "7-up" or in the fumehood in a beaker "Piranha" | ||
Both 7-up and Piranha removes heavy organics. | Both 7-up and Piranha removes heavy organics. | ||
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===Comparing data for 7-up and Piranha=== | ===Comparing data for 7-up and Piranha=== | ||
{| border="2" cellspacing="0" cellpadding="4" align="left" width="570pt" | {| border="2" cellspacing="0" cellpadding="4" align="left" width="570pt" | ||
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