Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

@@ Line 123: / Line 123: @@
 ! 2 wafers with separate jdf files
 |-
-| Lorem ipsum dolor sit amet
+| MAGAZIN 'PLAIN'
+;---------------------------
+; WAFER #2A FOR THOMAS
+;---------------------------
+#3
+%2A
+JDF     'thomasjfeb242010',1
+ACC 100
+CALPRM '0.2na_ap5'
+DEFMODE 2      ;2_stage deflection
+RESIST 320
+SHOT A,12
+OFFSET(0,0)
+;---------------------------
+; WAFER #2B FOR JONAS
+;---------------------------
+#3
+%2B
+JDF     'jonaspfeb242010',1
+ACC 100
+CALPRM '0.2na_ap5'
+DEFMODE 2      ;2_stage deflection
+RESIST 250
+SHOT A,8
+OFFSET(0,0)
+;---------------------------
+END
 |}