Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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If the next user of the machine has loaded a cassette in slot #10 and you wish to load that cassette after exposure, you can finalize the sdf-file with 'END 10'. | If the next user of the machine has loaded a cassette in slot #10 and you wish to load that cassette after exposure, you can finalize the sdf-file with 'END 10'. | ||
== jdf-file == | === jdf-file === | ||
The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | ||