Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions
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= Preparing sdf and jdf files = | = Preparing sdf and jdf files = | ||
Sdf- and jdf-files should not be created or edited in a regular notepad or wordpad program. Use only SuperEdi, which is freeware and available on the computers in the e-beam room. When you save a sdf- or jdf-file in SuperEdi, make sure to set the line endings to UNIX. | |||
Sdf- and jdf-files should not be created or edited in a regular notepad or wordpad program. Use only SuperEdi, which is freeware and available on the | |||
Both the sdf- and jdf-file should carry names using no capital letters. | Both the sdf- and jdf-file should carry names using no capital letters. | ||
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You can find templates of sdf- and jdf-files in the folder home/eb0/jeoleb/job/templates on the 9500 computer. | You can find templates of sdf- and jdf-files in the folder home/eb0/jeoleb/job/templates on the 9500 computer. | ||
== Simple sdf and jdf files == | |||
== | === sdf-file === | ||
The sdf-file contains a series of commands and parameters that specifies jdf filename, type | The sdf-file contains a series of commands and parameters that specifies jdf filename, type | ||
of cassette, shot pitch and condition file. It also specifies whether the pattern to be exposed | of cassette, shot pitch and condition file. It also specifies whether the pattern to be exposed requires alignment. | ||
requires alignment. | |||
Below, an explanation of the template 'simple.sdf'. Note that semicolon outcomments the text: | |||
___________________________________________________________________________ | ___________________________________________________________________________ | ||
MAGAZIN 'SIMPLE1' The magazine name is SIMPLE1; max. 20 capital letters | MAGAZIN 'SIMPLE1' The magazine name is SIMPLE1; max. 20 capital letters | ||
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___________________________________________________________________________ | ___________________________________________________________________________ | ||
Note that the unit in the SHOT command is in 0.5nm, i.e. 'SHOT A,16' gives a shot pitch | Note that the unit in the SHOT command is in 0.5nm, i.e. 'SHOT A,16' gives a shot pitch of 8nm. | ||
If the next user of the machine has loaded a cassette in slot #10 and you wish to load that cassette after exposure, you can finalize the sdf-file with 'END 10'. | |||
== | == jdf-file == | ||
The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | The jdf-file contains a series of commands and parameters that specifies what pattern (v30-file) is to be written where on the sample. It also specifies what calibrations are to be performed during writing. | ||
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STDCUR 0.22 ;nA Beam current (in nA) used for writing, see note 2 | STDCUR 0.22 ;nA Beam current (in nA) used for writing, see note 2 | ||
END End of jdf-file | END End of jdf-file | ||
___________________________________________________________________________ | |||
Note | Note 1: 9 chips are written, the upper left chip has center in (X,Y) = (0,0). The pitch between the chips is 2 mm in x-direction and 3 mm in y-direction. | ||
work well below a scan speed of 100 MHz and thus gives room for a fluctuating current. | Note 2: You should always add 10% to the current defined in 'STDCUR'; this ensures you work well below a scan speed of 100 MHz and thus gives room for a fluctuating current. | ||
___________________________________________________________________________ | ___________________________________________________________________________ | ||
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Example 2.1: Two 2” wafers are loaded in position 2A and 2B with separate JDF-files | Example 2.1: Two 2” wafers are loaded in position 2A and 2B with separate JDF-files | ||
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______________________________________________________________________________ | ______________________________________________________________________________ | ||
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MAGAZIN 'LAYERS' | MAGAZIN 'LAYERS' | ||