Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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 = Converting from GDS to v30 (BEAMER)=
-Please read the special BEAMER manual for a more advanced description of the BEAMER program.
+The gds-file is converted to a v30-file by using the programme BEAMER. Please read the special BEAMER manual for a more advanced description of the BEAMER program.
-The gds-file is transferred to the folder 'C:\1 gds files\name\date’ on DCH1350. If your v30-file is heavy, you can use DCH1352 instead; this computer is reached via DCH1350 by a remote desktop connection. On DCH1352, put the gds-file in the folder ‘D:\1 gds files\name\date’.
+# Open BEAMER.
+# Drag the ‘Import’-module to the top-right window of Layout Beamer, open the gds-file to convert
+# If the pattern has abutting polygons and even overlapping polygons which lead to double exposure, incorrect simulations etc., this can be fixed by running a ‘Heal’ program; drag the ‘HEAL’-module on top of the gds-file
+# Drag the ‘Export’-module on top of the gds-file, export to the location ‘C:\1 gds files\name\date’. Export in JEOL52-format and change field-size to 1000µm x 1000 µm (under 'Advanced’). Click RUN on the Export-icon to execute the whole procedure
-This computer also has L-edit installed if last-minute changes to the pattern are needed. The gds-file should then be converted to a v30-file by using the programme BEAMER. There is an elaborated BEAMER software manual available from LabManager (under Technical Documents).
+The gds-file is now converted to v30-format. In order to check the layout pattern double-click on the v30-module and and a VIEW LAYOUT window will open.
-    Open BEAMER.
-    Drag the ‘Import’-module to the top-right window of Layout Beamer, open the gds-file to convert
-    If the pattern has abutting polygons and even overlapping polygons which lead to double exposure, incorrect simulations etc., this can be fixed by running a ‘Heal’ program; drag the ‘HEAL’-module on top of the gds-file
-    Drag the ‘Export’-module on top of the gds-file, export to the location ‘C:\1 gds files\name\date’. Export in JEOL52-format and change field-size to 1000µm x 1000 µm (under ‘Advanced’). Click RUN on the Export-icon to run the whole procedure
-The gds-file is now converted to v30-format. In order to check the layout pattern
-Double-click on the v30-module and and a VIEW LAYOUT window will open.
 = Preparing sdf and jdf files =