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For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader.  
For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader.  
There are two daily loading sessions where cassettes will be loaded into the autoloader by trained DTU Danchip personel:
*10:00
*13:30
   
   
To use the e-beam writer, book the machine via LabManager, '''note the number and type of substrate as well as the condition file to be used in the 'Public Comment:' field in LabManager'''. Mount your substrate in the cassette (and pre-align if necessary) before the loading session preceding your booking, and show up at the time your cassette is loaded.  
To use the e-beam writer, book the machine via LabManager, '''note the number and type of substrate as well as the condition file to be used in the 'Public Comment:' field in LabManager'''. Mount your substrate in the cassette and pre-align if necessary. Call for help from DTU Danchip staff to load your cassette into the robot loader (the autoloader).  


After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader.
After your exposure, fully trained users can unload their cassettes from the autoloader, unmount their substrates and re-load an '''empty''' cassette into the autoloader.
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* A jdf-, and sdf-file manual describing how to prepare sdf-, and jdf-files (found under 'Technical Documents')
* A jdf-, and sdf-file manual describing how to prepare sdf-, and jdf-files (found under 'Technical Documents')
* A BEAMER manual describing how to convert your pattern file (GDSII-format) to v30-format (found under 'Technical Documents')'''
* A BEAMER manual describing how to convert your pattern file (GDSII-format) to v30-format (found under 'Technical Documents')'''




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