Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation: Difference between revisions
No edit summary |
|||
| Line 1: | Line 1: | ||
== Parameters == | == Parameters == | ||
<!-- revised 1/6-2015 by jmli --> | |||
{| border="2" cellspacing="0" cellpadding="0" align="left" | {| border="2" cellspacing="0" cellpadding="0" align="left" | ||
! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ! rowspan="5" align="center" | [[Image:Trench-defs-1.jpg|512px x 384px|Solid shade]] | ||