Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions
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|'''Selectivity R<sub>Si<sub>3</sub>N<sub>4</sub></sub> / R<sub>SiO<sub>2</sub></sub>''' | |'''Selectivity R<sub>Si<sub>3</sub>N<sub>4</sub></sub> / R<sub>SiO<sub>2</sub></sub>''' | ||
|~ | |~20 | ||
| | |>21 | ||
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|'''Batch size''' | |'''Batch size''' | ||