Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331: Difference between revisions
Created page with "== The Sinano3.31 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.31''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, ..." |
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== The Sinano3.31 recipe == | == The Sinano3.31 recipe == | ||
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Recipe Sinano3.31''' | |+ '''Recipe Sinano3.31''' | ||