Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano4: Difference between revisions
Created page with "== The Sinano4.0 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano4.0''' |- ! rowspan="6" align="center"| Recipe | Gas | Cl<sub>2</sub> 20 sccm |- ..." |
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== The Sinano4.0 recipe == | == The Sinano4.0 recipe == | ||
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Recipe Sinano4.0''' | |+ '''Recipe Sinano4.0''' | ||