Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano3: Difference between revisions
Created page with "== The Sinano3.0 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.0''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, HB..." |
|||
| Line 1: | Line 1: | ||
== The Sinano3.0 recipe == | == The Sinano3.0 recipe == | ||
<!-- revised 1/6-2015 by jmli --> | |||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Recipe Sinano3.0''' | |+ '''Recipe Sinano3.0''' | ||
| Line 75: | Line 75: | ||
|- | |- | ||
|} | |} | ||
== The Sinano3.0 recipe == | == The Sinano3.0 recipe == | ||