Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nb-1.0: Difference between revisions
Created page with "== Trial runs on HTF stepper wafers 22/6-2012 == {| border="2" cellpadding="2" cellspacing="1" |+ '''Process conditions''' |- ! rowspan="4" align="center"| Substrate informa..." |
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== Trial runs on HTF stepper wafers 22/6-2012 == | == Trial runs on HTF stepper wafers 22/6-2012 == | ||
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+ '''Process conditions''' | |+ '''Process conditions''' | ||