Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Difference between revisions

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	==Results of Design of Experiments optimization of magnetic stack etching ([mailto:kristian.rasmussen@nanotech.dtu.dk Kristian Hagsted Rasmussen] spring 2011)==		==Results of Design of Experiments optimization of magnetic stack etching ([mailto:kristian.rasmussen@nanotech.dtu.dk Kristian Hagsted Rasmussen] spring 2011)==


	===Process parameters===		===Process parameters===