Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE blazed gratings: Difference between revisions
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<gallery caption="Some examples of blazed gratingens in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | <gallery caption="Some examples of blazed gratingens in fused silica etched with Cr and DUV resist as masking layer " widths="300px" heights="250px"> | ||