Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions
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!Comments | !Comments | ||
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|-style="background:WhiteSmoke; color:black" | |||
|Si with native oxide | |||
|79.3° | |||
|22/5 2015 | |||
|taran | |||
|average of three measurements on one sample | |||
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|taran | |taran | ||
|average of nine measurements (three measurements on three different samples) | |average of nine measurements (three measurements on three different samples) | ||
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!Comments | !Comments | ||
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|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Si with native oxide | |||
|72.8° | |||
|22/5 2015 | |||
|taran | |||
|average of three measurements on one sample | |||
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|taran | |taran | ||
|average of nine measurements (three measurements on three different samples) | |average of nine measurements (three measurements on three different samples) | ||
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