Specific Process Knowledge/Etch/Etching of Titanium: Difference between revisions
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Photoresist (1.5 µm AZ5214E) | Photoresist (1.5 µm AZ5214E) | ||
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Eagle resist | |||
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|'''Etch rate''' | |'''Etch rate''' | ||
| Line 34: | Line 34: | ||
| | | | ||
Photoresist (1.5 µm AZ5214E) | Photoresist (1.5 µm AZ5214E) | ||
| | | | ||
Eagle resist | |||
|- | |- | ||
|'''Etch rate''' | |'''Etch rate''' | ||