Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions
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! Barc etch with O2 | ! Barc etch with O2 | ||
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|Coil power||800W|| | |Coil power||800W||120w | ||
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|Platen power||100W||15W | |Platen power||100W||15W | ||
| Line 20: | Line 20: | ||
|Flow rate H2||20sccm|| | |Flow rate H2||20sccm|| | ||
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|Flow rate O2|||| | |Flow rate O2||||10sccm | ||
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|} | |} | ||