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Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma UV processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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*'''(2610) DCH 150mm nLOF 2020 1.5um'''
*'''(2610) DCH 150mm nLOF 2020 1.5um'''
*'''(2611) DCH 150mm nLOF 2020 1.5um HMDS'''
*'''(2611) DCH 150mm nLOF 2020 1.5um HMDS'''
Spin-off: 4600 rpm.
Spin-off: 6000 rpm.


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*'''(2620) DCH 150mm nLOF 2020 2um'''
*'''(2620) DCH 150mm nLOF 2020 2um'''
*'''(2621) DCH 150mm nLOF 2020 2um HMDS'''
*'''(2621) DCH 150mm nLOF 2020 2um HMDS'''
Spin-off: 2600 rpm.
Spin-off: 3300 rpm.


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*'''(2640) DCH 150mm nLOF 2020 4um'''
*'''(2640) DCH 150mm nLOF 2020 4um'''
*'''(2641) DCH 150mm nLOF 2020 4um HMDS'''
*'''(2641) DCH 150mm nLOF 2020 4um HMDS'''
Waiting: 75s @ 600 rpm. Spin-off: 10s @ 3000 rpm.
Waiting: 45s @ 600 rpm. Spin-off: 10s @ 3500 rpm.


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