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Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,317 edits
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! Results
! Results
|-  
|-  
|Etch rate in barc||52nm in 30s [bghe 20150519]
|Etch rate in barc||52nm in 30s ''[bghe 20150519]''
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|-
|Etch rate in KRF resist||27 nm in 30s [bghe 20150519]
|Etch rate in KRF resist||27 nm in 30s ''[bghe 20150519]''
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|-  
|Selectivity KRF:Barc||1:2  
|Selectivity KRF:Barc||1:2  
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