Specific Process Knowledge/Etch/ICP Metal Etcher/Barc Etch: Difference between revisions

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Barc Etch

Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.

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	==Barc Etch==		==Barc Etch==

	Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach ~~your~~ etch depth.~~Her~~ is an example of a barc etch I have started testing.		Etching barc with a dedicated recipe for barc etching is a good idea if you are on the limit of having enough DUV resist mask to reach etch depth you need.Here is an example of a barc etch I have started testing.